Observation Of Grating Surfaces By The Use Of STM

Takanori Oshio; Yoshiyuki Sakai; Shaw Ehara

doi:10.1117/12.941743

9 February 1987 Observation Of Grating Surfaces By The Use Of STM

Takanori Oshio, Yoshiyuki Sakai, Shaw Ehara

Proceedings Volume 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III; (1987) https://doi.org/10.1117/12.941743
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

The surfaces of several optical gratings have been observed by a scanning tunneling microscope (STM) in the atomosphere without contacting surface. Blaze angles of optical gratings with 3600 lines/mm and 1200 lines/mm have been measured. It is proved that the scanning tunneling microscopy is one of the useful techniques for topographic mapping of gratings with very fine pitches.

Citation Download Citation

Takanori Oshio, Yoshiyuki Sakai, and Shaw Ehara "Observation Of Grating Surfaces By The Use Of STM", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); https://doi.org/10.1117/12.941743

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