Paper
16 September 2011 Large format high operability low cost infrared focal plane array performance and capabilities
Decosta Lindsay, James W. Bangs, John Vampola, Frank Jaworski, Lynn Mears, Rich Wyles, James Asbrock, Elyse Norton, Madhu Reddy, Kimon Rybnicek, Alan Levy, Neil R. Malone
Author Affiliations +
Abstract
Large format detector arrays are responsive uniformly over spectral 1-5μm wavelength range and are available with RVS' high quality HgCdTe detector epitaxial layers on large area 15 cm diameter wafers. Large wafers enable both low cost High Definition (HD) staring FPAs, as well as the ability to approach giga-pixel format detector arrays with a seamless 10cm ×10cm continuous image plane size possible. With a 15 cm diameter detector substrate it is a straightforward growth path to a 5k×5k μm pitch 25 Mega-pixel infrared focal plane array (FPA) with smaller pitches allowing even greater format along the 10cm die length. This paper describes arrays 1.5 to 4 Mega-pixel infrared HgCdTe developed by RVS for demanding higher performance applications. Performance data for both the detector and ROIC for typical SWIR and MWIR FPAs operating at 85K will be presented. This paper will provide FPA performance capability for small pitch large format HgCdTe/Si detector arrays fabricated at RVS and manufacturing readiness low cost Mega-pixel infrared FPAs for current and future wide FOV high-resolution systems.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Decosta Lindsay, James W. Bangs, John Vampola, Frank Jaworski, Lynn Mears, Rich Wyles, James Asbrock, Elyse Norton, Madhu Reddy, Kimon Rybnicek, Alan Levy, and Neil R. Malone "Large format high operability low cost infrared focal plane array performance and capabilities", Proc. SPIE 8154, Infrared Remote Sensing and Instrumentation XIX, 81540S (16 September 2011); https://doi.org/10.1117/12.898349
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Cited by 4 scholarly publications.
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KEYWORDS
Semiconducting wafers

Sensors

Staring arrays

Silicon

Readout integrated circuits

Infrared radiation

Mercury cadmium telluride

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