16 September 2011 Large format high operability low cost infrared focal plane array performance and capabilities
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Abstract
Large format detector arrays are responsive uniformly over spectral 1-5μm wavelength range and are available with RVS' high quality HgCdTe detector epitaxial layers on large area 15 cm diameter wafers. Large wafers enable both low cost High Definition (HD) staring FPAs, as well as the ability to approach giga-pixel format detector arrays with a seamless 10cm ×10cm continuous image plane size possible. With a 15 cm diameter detector substrate it is a straightforward growth path to a 5k×5k μm pitch 25 Mega-pixel infrared focal plane array (FPA) with smaller pitches allowing even greater format along the 10cm die length. This paper describes arrays 1.5 to 4 Mega-pixel infrared HgCdTe developed by RVS for demanding higher performance applications. Performance data for both the detector and ROIC for typical SWIR and MWIR FPAs operating at 85K will be presented. This paper will provide FPA performance capability for small pitch large format HgCdTe/Si detector arrays fabricated at RVS and manufacturing readiness low cost Mega-pixel infrared FPAs for current and future wide FOV high-resolution systems.
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Decosta Lindsay, Decosta Lindsay, James W. Bangs, James W. Bangs, John Vampola, John Vampola, Frank Jaworski, Frank Jaworski, Lynn Mears, Lynn Mears, Rich Wyles, Rich Wyles, James Asbrock, James Asbrock, Elyse Norton, Elyse Norton, Madhu Reddy, Madhu Reddy, Kimon Rybnicek, Kimon Rybnicek, Alan Levy, Alan Levy, Neil R. Malone, Neil R. Malone, } "Large format high operability low cost infrared focal plane array performance and capabilities", Proc. SPIE 8154, Infrared Remote Sensing and Instrumentation XIX, 81540S (16 September 2011); doi: 10.1117/12.898349; https://doi.org/10.1117/12.898349
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