Paper
16 September 2011 Cytochrome c thin film with high temperature of coefficient for infrared detection
Author Affiliations +
Abstract
The cytochrome c (protein) thin film on the oxide surface has been reported high temperature coefficient of resistance (TCR). The protein thin film resistance acts as exponential grow under the constant voltage bias. The experimental results showed that the TCR exceeded 20% 1/K, which is 5times higher than popular vanadium oxide (VOx). We also found the protein thin film can be attached on to the SU8 photoresist surface by changing the SU8 surface more hydrophilic and simple spinning coat technique. The cytochrome c thin film on SU8 also showed the high TCR. With easy fabrication methods and lower thermal conductivity of SU8 and protein, we believe that it is possible to fabricate new generation microbolometer based on cytochrome c protein and SU-8 photoresist.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chung Hao Chu and Guo-Dung J. Su "Cytochrome c thin film with high temperature of coefficient for infrared detection", Proc. SPIE 8155, Infrared Sensors, Devices, and Applications; and Single Photon Imaging II, 815518 (16 September 2011); https://doi.org/10.1117/12.892975
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Cited by 2 scholarly publications.
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KEYWORDS
Thin films

Proteins

Oxides

Resistance

Silicon

Infrared radiation

Microbolometers

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