Absolute Distance Interferometry

N. A. Massie; H.John Caulfield

doi:10.1117/12.941763

23 March 1987 Absolute Distance Interferometry

N. A. Massie, H.John Caulfield

Proceedings Volume 0816, Interferometric Metrology; (1987) https://doi.org/10.1117/12.941763
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Measurements of distance obtained interferometrically are modulo(X) but can be made with accuracy of a fraction of the wavelength of the light used. Various techniques have been developed to overcome this limitation and obtain an absolute distance measurement with interferometric accuracy. To accomplish this, it is necessary to make measurements with more than one wavelength. The basic principles of absolute distance interferometry are discussed and the current state of the technology is reviewed.

Citation Download Citation

N. A. Massie and H.John Caulfield "Absolute Distance Interferometry", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); https://doi.org/10.1117/12.941763

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