13 September 2011 Secrets of subwavelength imaging and lithography
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Abstract
To understand the limits and tradeoffs of nearly all existing subwavelength imaging techniques it sufficient to understand magnetic resonance imaging (MRI) and its generalizations. In many cases, subwavelength optical lithography can be viewed as the inverse problem to imaging and so the same principles apply. A simple review of MRI is given which shows how the most popular subwavelength imaging and lithography techniques naturally arise as special cases.
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Philip R. Hemmer, Philip R. Hemmer, } "Secrets of subwavelength imaging and lithography", Proc. SPIE 8163, Quantum Communications and Quantum Imaging IX, 816303 (13 September 2011); doi: 10.1117/12.894581; https://doi.org/10.1117/12.894581
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