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22 September 2011 Laser testing of an Iris AO dielectric-coated segmented MEMS DM
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Iris AO has been developing dielectric-coated segmented MEMS deformable mirrors (DM) for use in laser applications that range from 355-1540 nm. In order to mitigate deformation from residual stress in the thick dielectric coatings, a stress-compensation layer has been added to the underside if the DM segments. This paper describes fabrication results of DMs with high reflectance dielectric coatings for 532 nm, 1064 nm, and 1540 nm. Additionally, a DM with a 532 nm coating has been tested with a 2 W, 532 nm CW laser. Laser testing shows the DM can handle 300 W/cm2 with off-theshelf packaging. Projections show that with good heat sinking, the same DM can handle laser power densities of 2800 W/cm2. The coatings showed no signs of damage after exposure to a w0=25 μm beam with a power density of 205 kW/cm2 for 105 minutes at the center of a segment and at segment edges exposed to 180 kW/cm2 for 45 minutes.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael A. Helmbrecht, Min He, Andrew P. Norton, and Donald T. Gavel "Laser testing of an Iris AO dielectric-coated segmented MEMS DM", Proc. SPIE 8165, Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems, 81650U (22 September 2011);


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