13 September 2011 Shack-Hartmann wavefront sensor with high sensitivity by using long focal length microlens array
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The performance of Shack-Hartmann wavefront sensor (SHWFS) is mainly described by the accuracy, spatial resolution, dynamic range, and sensitivity of the measurement. These factors are particularly affected by the design of the microlens array (MLA). In order to provide a large dynamic range of wavefront measurement, most of the conventional and commercial SHWFS implemented a short focal length lenslet array, which means that the measurement sensitivity is being sacrificed and the accuracy of the wavefront sensor will be degraded. However, it is also critical to detect very small displacement of SHWFS spot in order to reconstruct it into a fine wavefront variation. We fabricated long focal length MLA with various structure arrangement by thermal reflow process with Polydimethysiloxane (PDMS) cover on the glass substrate and implemented them on the image system. A longer focal length will provide high sensitivity in determining the average slope across each lenslet under a given wavefront, and the spatial resolution of the wavefront sensor is increased by the number of lenslets across the detector. The experimental setup consists of the fabricated 245 μm diameter MLA which provides a 5.2 mm long focal distance and is paired with the CMOS as the detector. The observable smallest sensitivity is around wavelength/20 (λ=630nm).
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Vinna Lin, Hsiang-Chun Wei, and Guo-Dung J. Su "Shack-Hartmann wavefront sensor with high sensitivity by using long focal length microlens array", Proc. SPIE 8165, Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems, 81650V (13 September 2011); doi: 10.1117/12.893364; https://doi.org/10.1117/12.893364

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