14 September 2011 Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors
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Abstract
By analysis of the mechanical equations, describing deformable mirrors, we show that the print-through is the natural property of a deformable mirror, which is completely defined by the geometry and mechanics of deformation. The print-through causes increased scattering in imaging applications, and can result in hot/cold spots in laser applications. Further development of adaptive optics for extreme UV applications would also require to address the print-through problem. We describe different ways to reduce, or completely eliminate the print-through in continuous faceplate and membrane deformable mirrors. In combination with simple hysteresis compensation, our approach allows for high-precision feedforward control of these deformable mirrors, directly in terms of Zernike modes.
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Gleb Vdovin, Oleg Soloviev, Mikhail Loktev, Slava Savenko, Lukasz Dziechciarczyk, "Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors", Proc. SPIE 8165, Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems, 81650W (14 September 2011); doi: 10.1117/12.893496; https://doi.org/10.1117/12.893496
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KEYWORDS
Actuators

Deformable mirrors

Mirrors

Zernike polynomials

Wavefronts

Monochromatic aberrations

Adaptive optics

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