PACA2M: magnetron sputtering for 2-meter optics

Grégory Chauveau; Didier Torricini; Catherine Grèzes-Besset; Dragan Stojcevski; Michel Lequime

doi:10.1117/12.897884

3 October 2011 PACA2M: magnetron sputtering for 2-meter optics

Grégory Chauveau, Didier Torricini, Catherine Grèzes-Besset, Dragan Stojcevski, Michel Lequime

Proceedings Volume 8168, Advances in Optical Thin Films IV; 81680P (2011) https://doi.org/10.1117/12.897884
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

In this paper, we present in detail the new deposition magnetron sputtering machine so-called PACA2M, that CILAS has implemented for coating large optics up to 2 meters, within a dedicated consortium, with the financial support of the French Department of Industry and of the local administrations, and with the help and the expertise of the French OPTITEC optical cluster. Our innovative large size deposition machine is equipped with 2.5 meters-long planar magnetrons (seven cathodes), to ensure uniform coating on large optical components, up to 2 meters by 2 meters, 40 centimetres thick and to 1.5 ton weight. Some magnetrons are adapted to a DC, Mid Frequency (MF) or Radio Frequency (RF) operation, which allows the deposition of metals and also dielectric oxides under reactive atmosphere. Moreover, PACA2M is equipped with a powerful broadband optical monitoring system that permits to reach sophisticated spectral specifications and a good agreement with theory, which will be presented in detail in another paper of the conference. As the magnetron sputtering technique leads to very dense layers close to bulk material, it is particularly well suited for applications that require environmental resistance, as for example the LMJ (Laser MegaJoule) French laser fusion program in which CILAS is in charge of the metallic mirrors on large complex-shaped reflectors for laser chains amplifiers. Numerous experimental results are presented here such as protected and enhanced metallic mirrors, metal-dielectric absorbing coatings or multi-dielectric coatings, deposited on different kinds of substrates, for which qualification tests have been done.

Citation Download Citation

Grégory Chauveau, Didier Torricini, Catherine Grèzes-Besset, Dragan Stojcevski, and Michel Lequime "PACA2M: magnetron sputtering for 2-meter optics", Proc. SPIE 8168, Advances in Optical Thin Films IV, 81680P (3 October 2011); https://doi.org/10.1117/12.897884

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