Investigation of the optical property and structure of WO3 thin films with different sputtering depositions

Hsi-Chao Chen; Der-Jun Jan; Chien-Han Chen; Kuo-Ting Huang; Yen-Ming Lo; Sheng-Hui Chen

doi:10.1117/12.897017

3 October 2011 Investigation of the optical property and structure of WO₃ thin films with different sputtering depositions

Hsi-Chao Chen, Der-Jun Jan, Chien-Han Chen, Kuo-Ting Huang, Yen-Ming Lo, Sheng-Hui Chen

Author Affiliations +

Proceedings Volume 8168, Advances in Optical Thin Films IV; 81681Z (2011) https://doi.org/10.1117/12.897017
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

The purpose of this research was to compare the optical properties and structure of tungsten oxide (WO₃) thin films that was deposited by different sputtering depositions. WO₃ thin films deposited by two different depositions of direct current (DC) magnetron sputtering and pulsed DC sputtering. A 99.95% WO₃ target was used as the starting material for these depositions. These WO₃ thin films were deposited on the ITO glass, PET and silicon substrate by different ratios of oxygen and argon. A shadow moiré interferometer would be introduced to measure the residual stress for PET substrate. RF magnetron sputtering had the large residual stress than the other's depositions. A Raman spectrum could exhibit the phase of oxidation of WO₃ thin film by different depositions. At the ratio of oxygen and argon was about 1:1, and the WO₃ thin films had the best oxidation. However, it was important at the change of the transmittance (ΔT = T_bleached - T_colored) between the coloring and bleaching for the smart window. Therefore, we also found the WO₃ thin films had the large variation of transmittance between the coloring and bleaching at the gas ratios of oxygen and argon of 1:1.

Citation Download Citation

Hsi-Chao Chen, Der-Jun Jan, Chien-Han Chen, Kuo-Ting Huang, Yen-Ming Lo, and Sheng-Hui Chen "Investigation of the optical property and structure of WO₃ thin films with different sputtering depositions", Proc. SPIE 8168, Advances in Optical Thin Films IV, 81681Z (3 October 2011); https://doi.org/10.1117/12.897017

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