M. Jupé,1,2 S. Malobabic,1,2 C. Schmitz,1 C. Gouldieff,3 H. Steffen,4 R. Wiese,4 D. Ristau1,5
1Laser Zentrum Hannover e.V. (Germany) 2QUEST: Ctr. for Quantum Engineering and Space-Time Research (Germany) 3Institut Fresnel (France) 4Leibniz-Institute for Plasma Science and Technology e.V. (Germany) 5QUEST: Ctr. for Quantum Engineering and Space-Time Research (France)
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Ion beam sputtering (IBS) is a well-established process to manufacture lowest loss coatings of highest
complexity of spectral behavior. Nevertheless, the losses due to absorption in the bulk materials are still orders
of magnitude lower than in the corresponding coatings, indicating that a further optimization of the process is
possible. Such an improvement in quality requires a more detailed knowledge of the correlation between the
process parameters and the coating quality.
The present paper reports on a preliminary study based on a parameterization strategy for IBS processes. The
propagation properties of the ion beam were investigated in detail, where both, the total dissipation of energy and
the argon ion velocity distribution of the beam were measured and analyzed. Furthermore, research was
concentrated on the sputtered material considering the dependence of the optical losses of the deposited
dielectric layers on the physical properties of the adatoms. The energy distribution and the charge state of the
material particles were investigated with respect to the implementation of a phase separating IBS process.
M. Jupé,S. Malobabic,C. Schmitz,C. Gouldieff,H. Steffen,R. Wiese, andD. Ristau
"Investigation of ion beam properties and coating material during IBS", Proc. SPIE 8168, Advances in Optical Thin Films IV, 816825 (4 October 2011); https://doi.org/10.1117/12.905363
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
M. Jupé, S. Malobabic, C. Schmitz, C. Gouldieff, H. Steffen, R. Wiese, D. Ristau, "Investigation of ion beam properties and coating material during IBS," Proc. SPIE 8168, Advances in Optical Thin Films IV, 816825 (4 October 2011); https://doi.org/10.1117/12.905363