21 September 2011 Adaptive two-beam interferometer for testing optical surfaces
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Abstract
The aim of this work is to design an interferometric system that will adapt the shape of the reference wavefront to the shape of the measured optical surface. The designed adaptive two-beam interferometer uses the electromagnetic deformable mirror MiraoTM52 from ImagineEyes for a generation of the reference wavefront and it can be applied for measurements of flat and spherical surfaces and even for measurements of free-form surfaces. We perform a detailed analysis of this technique and several possible measurement setups and principles of measurement and calibration of the designed adaptive interferometer are described. The principle of measurement is shown on an example of the experimental set-up of the adaptive interferometer in our laboratory.
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Antonin Miks, Antonin Miks, Jiri Novak, Jiri Novak, Pavel Novak, Pavel Novak, } "Adaptive two-beam interferometer for testing optical surfaces", Proc. SPIE 8169, Optical Fabrication, Testing, and Metrology IV, 81690Y (21 September 2011); doi: 10.1117/12.896786; https://doi.org/10.1117/12.896786
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