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4 October 2011 Efficient use of grating theories with partially coherent illumination
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Abstract
We discuss how the rigorous grating theory can be extended to cover also partially coherent illumination such that the method stays computationally reasonable. We first discuss the S-matrix formalism if the input field is not a simple plane wave, and then continue the approach to the case of partial coherence. We illustrate the approach by investigating the imaging of a grating in a classical bright-field imaging setup.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jani Tervo, Heikki J. Hyvärinen, Toni Saastamoinen, Ismo Vartiainen, and Jari Turunen "Efficient use of grating theories with partially coherent illumination", Proc. SPIE 8171, Physical Optics, 81710F (4 October 2011); https://doi.org/10.1117/12.896805
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