5 October 2011 Corrected coupled-wave theory for non-slanted reflection gratings
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Proceedings Volume 8171, Physical Optics; 81710R (2011); doi: 10.1117/12.896877
Event: SPIE Optical Systems Design, 2011, Marseille, France
Abstract
In this work we present an analysis of non-slanted reflection gratings by using a corrected Coupled Wave Theory which takes into account boundary conditions. It is well known that Kogelnik's Coupled Wave Theory predicts with great accuracy the response of the efficiency of the zero and first order for volume phase gratings, for both reflection and transmission gratings. Nonetheless, since this theory disregard the second derivatives in the coupled wave equations derived from Maxwell equations, it doesn't account for boundary conditions. Moreover only two orders are supposed, so when either the thickness is low or when high refractive index high are recorded in the element Kogelnik's Theory deviates from the expected results. In Addition, for non-slanted reflection gratings, the natural reflected wave superimpose the reflection order predicted by Coupled Wave theories, so the reflectance cannot be obtained by the classical expression of Kogelnik's Theory for reflection gratings. In this work we correct Kogelnik's Coupled Wave Theory to take into account these issues, the results are compared to those obtained by a Matrix Method, showing good agreement between both theories.
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L. Alberto Estepa, Cristian Neipp, Jorge Francés, Andrés Márquez, Sergio Bleda, Manuel Pérez-Molina, Manuel Ortuño, Sergi Gallego, "Corrected coupled-wave theory for non-slanted reflection gratings", Proc. SPIE 8171, Physical Optics, 81710R (5 October 2011); doi: 10.1117/12.896877; http://dx.doi.org/10.1117/12.896877
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KEYWORDS
Diffraction gratings

Refractive index

Diffraction

Modulation

Chemical mechanical planarization

Differential equations

Wave propagation

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