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1 January 1987 Near-Angle Scattered Light From Binary Optics
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The angle-resolved scattering measurement is an important indication of the fabrication errors and manufacturing limitations in the emerging technology of binary optics. A simple instrument is described which is capable of measuring scattered light from 1 degree to 0.01 degrees or closer to the main transmitted beam, and down to levels of one-billionth of the peak intensity. Scatter measurements are reported for a binary optic and are compared to the power spectral density function determined by a WYKO profiler. It is found that the binary fabrication process has increased the near-angle scatter by about a factor of 30X the scatter from the smooth surface. The power spectral density measurement does not compare well with the scattering data.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Douglas W. Ricks "Near-Angle Scattered Light From Binary Optics", Proc. SPIE 0818, Current Developments in Optical Engineering II, (1 January 1987);

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