Paper
1 January 1987 Precision Surface Figure Measurements Of Large Flat Mirrors Using Grazing Incidence Interferometery
A. L. Duncan, D. W. Ball, N. Bareket, R. M. Bell, M. S. Dombrowski, G. K. Ferguson, C. W. Hughes, M. Malin, W. W. Metheny, S. S. Olivier, B. Rees, R. D. Reardon, M. Ritter, K. Siegel, G. P. West, E. A. Yates
Author Affiliations +
Abstract
A grazing incidence interferometer was developed at LMSC to sample the surface figure of large adaptive mirrors along narrow swaths utilizing small optical components mounted along the perimeter of the mirror. Preliminary tests have been conducted to determine the statistical limitation to the figure sensing resolution due to vibration of optical components and electronic noise. The results of these tests are discussed and plans for additional tests described.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. L. Duncan, D. W. Ball, N. Bareket, R. M. Bell, M. S. Dombrowski, G. K. Ferguson, C. W. Hughes, M. Malin, W. W. Metheny, S. S. Olivier, B. Rees, R. D. Reardon, M. Ritter, K. Siegel, G. P. West, and E. A. Yates "Precision Surface Figure Measurements Of Large Flat Mirrors Using Grazing Incidence Interferometery", Proc. SPIE 0818, Current Developments in Optical Engineering II, (1 January 1987); https://doi.org/10.1117/12.978910
Lens.org Logo
CITATIONS
Cited by 1 patent.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Mirrors

Sensors

Modulation

Phase measurement

Phase shift keying

Wavefronts

Transmitters

RELATED CONTENT

New ITF measure method based on fringes
Proceedings of SPIE (January 26 2016)
Precision Optical Wavefront Measurement
Proceedings of SPIE (March 31 1982)
Synthetic Aperture Beam Control System
Proceedings of SPIE (March 02 1984)
Review of phase-measuring interferometry
Proceedings of SPIE (January 01 1991)
Interferometer with two-frequency phase modulation
Proceedings of SPIE (December 12 1994)

Back to Top