28 November 2011 Potential of large diameter MgF2 single crystal grown by Czochralski method
Author Affiliations +
Magnesium fluoride (MgF2) single crystal is expected as the alternative of Quartz for polarizing materials in high power lithography system. MgF2 is anisotropic crystal and its physical properties are different along each crystal axes. Therefore it is difficult to make large diameter single crystal by using Bridgman method which is mainly used for growth of fluoride crystals. We have been studying on making large diameter and high quality single crystal by using Czochralski (CZ) method [1,2]. Previously we reported the stable growth of it with 150mm diameter. This time we succeeded to grow the crystal with over 200mm diameter. Additionally, by improving the purification process and growth process, we succeeded to reduce 75 percent of the amount of color center induced by irradiation of ArF laser.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yasuhiro Hashimoto, Yuichi Ikeda, Masao Ariyuki, Naoto Mochizuki, Teruhiko Nawata, "Potential of large diameter MgF2 single crystal grown by Czochralski method", Proc. SPIE 8190, Laser-Induced Damage in Optical Materials: 2011, 819015 (28 November 2011); doi: 10.1117/12.899103; https://doi.org/10.1117/12.899103


Low Temperature Transmittance Of Materials For The Infrared
Proceedings of SPIE (November 10 1975)
New silica glass for 157-nm lithography
Proceedings of SPIE (June 25 1999)
Development of large size MgF2 single crystal grown by the...
Proceedings of SPIE (December 31 2009)
Fused silica for 157-nm transmittance
Proceedings of SPIE (June 25 1999)

Back to Top