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28 November 2011 Absolute measurement of absorptance in DUV optics from laser-induced wavefront deformations
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Abstract
A measurement system for quantitative determination of both surface and bulk contributions to the photo-thermal absorption in DUV optics was developed. It is based upon a Hartmann- Shack wavefront sensor with a sensitivity of ~λ/10000 rms, accomplishing precise on-line monitoring of wavefront deformations of a collimated test laser beam transmitted perpendicular through the excimer laser-irradiated site of a cuboid sample. Caused by the temperature dependence of the refractive index as well as thermal expansion, the initially plane wavefront of the test laser is distorted into a cylindrical shape, with bending ends towards the surface. Sign and magnitude depend on index change and expansion. By comparison with thermal theory, this transient wavefront distortion yields a quantitative absolute measure of bulk and surface absorption losses in the sample. First results for fused silica are presented.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. Mann, U. Leinhos, J. Sudradjat, and B. Schäfer "Absolute measurement of absorptance in DUV optics from laser-induced wavefront deformations", Proc. SPIE 8190, Laser-Induced Damage in Optical Materials: 2011, 81901S (28 November 2011); https://doi.org/10.1117/12.899503
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