26 August 2011 Development of infrared FPA using bimaterial microcantilever arrays
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Abstract
An optical-readout bimaterial microcantilever-type infrared detector improving both IR absorption and pixel uniformity is proposed. A Focal Plane Array (FPA) of 128×128 pixels was fabricated using 4-inch silicon Micro-Electro Mechanical System (MEMS) processes. The FPA design and process development are discussed and the Scanning Electron Microscope (SEM) photos and imaging results of the FPA are presented. The Noise Equivalent Temperature Difference (NETD) of the proposed device was measured to be 200mK by a gray level change method and the time constant was calculated to be ~15 ms under a 10 mTorr pressure.
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Yufeng Jin, Yufeng Jin, Xiaomei Yu, Xiaomei Yu, } "Development of infrared FPA using bimaterial microcantilever arrays", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 819102 (26 August 2011); doi: 10.1117/12.898604; https://doi.org/10.1117/12.898604
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