8 September 2011 Fabrication of ultrathin silicon PIN detector
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Abstract
Ultra-thin silicon PIN detectors are applied widely in nuclear physics experiments and space exploration. It is used in ΔE-E telescope system as the ΔE detector to detect the energy loss of high energy particles so that to identify the charge and mass of the particle. The ΔE detector is required to be very thin(<50μm) in order to let low energy particles to go through the ΔE detector and enter the followed E detector. The fabrication of ultra-thin silicon detector is very difficult and challenging due to the fragility of the ultra-thin silicon membrane considering that the area of the detector is required to as large as 10~100 mm2. Several different technologies have been proposed to fabricate the ultra-thin silicon PIN detector, such as back side locally thinning of the high resistivity silicon wafer, application of the SOI technology or wafer thinning and bonding technology. The monolithic ΔE-E detector telescope technology has also been proposed. In this talk we review the development of ultra-thin silicon PIN detector technology including our research work.
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Min Yu, Min Yu, Xianshan Dong, Xianshan Dong, Ying Li, Ying Li, Dayu Tian, Dayu Tian, Jinyan Wang, Jinyan Wang, Yufeng Jin, Yufeng Jin, } "Fabrication of ultrathin silicon PIN detector", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 819103 (8 September 2011); doi: 10.1117/12.900555; https://doi.org/10.1117/12.900555
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