8 September 2011 MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution
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Miniaturized low-power, high-speed scanners are tremendously useful in a variety of applications. Besides MEMS micromirrors, the in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning mechanism minimizes the dynamic non-rigid-body out-of-plane deformation of the mirror surface, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis. Coupling a grating platform to an in-plane moving structure is also useful for real-time motion measurement which would otherwise be difficult to pick-up. The past developments till the current design are explored in this paper. Possible alternative applications besides image display, for example spectral imaging and realtime motion sensing are also described.
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Guangya Zhou, Guangya Zhou, Yu Du, Yu Du, Kelvin K. L. Cheo, Kelvin K. L. Cheo, Fook Siong Chau, Fook Siong Chau, } "MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 819105 (8 September 2011); doi: 10.1117/12.901076; https://doi.org/10.1117/12.901076

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