8 September 2011 Design optimization and implementation of a miniature optical coherence tomography probe based on a MEMS mirror
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Optical coherence tomography (OCT) provides non-invasive cross-sectional imaging capability and high resolution, but it has very limited applications inside human body because of the stringent size requirements for accessing the internal organs. Micro-Electro-Mechanical Systems (MEMS) is an emerging technology that can make devices with small size and fast speed. This paper reports the design optimization of a MEMS mirror-based miniature OCT probe. The probe consists of three main parts: a GRIN lens module (1.3 mm in diameter), a MEMS mirror (1.7 mm x 1.55 mm), and a stainless steel mount. A special assembly holder is designed for easy placement of parts and accurate optical alignment and real-time monitoring of optical alignment and electrical characteristics is also used to the assembly process. Code V is used for the optical design and analysis. Simulation shows that the changes of the spot size and focal length are within the acceptable range when the distance between the optical fiber and the GRIN lens varies less than 0.1 mm. The fiber may tilt as much as 2.5 degrees without any considerable change of the spot size and working distance. The maximum tolerance to the lateral shift between the fiber and GRIN lens is about 0.1 mm.
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Donglin Wang, Donglin Wang, Linlai Fu, Linlai Fu, Jingjing Sun, Jingjing Sun, Hongzhi Jia, Hongzhi Jia, Huikai Xie, Huikai Xie, } "Design optimization and implementation of a miniature optical coherence tomography probe based on a MEMS mirror", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 81910M (8 September 2011); doi: 10.1117/12.899645; https://doi.org/10.1117/12.899645


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