A new method to eliminate the noise of vacuum microelectronic high precision accelerometer

Hai-tao Liu; Zhi-yu Wen; Li Chen; Zhong-quan Wen; Xue-feng He

doi:10.1117/12.900912

8 September 2011 A new method to eliminate the noise of vacuum microelectronic high precision accelerometer

Hai-tao Liu, Zhi-yu Wen, Li Chen, Zhong-quan Wen, Xue-feng He

Proceedings Volume 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies; 81911X (2011) https://doi.org/10.1117/12.900912
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

The vacuum microelectronic high precision accelerometer was developed based on the vacuum field emission theory; it has many advantages such as high precision, good linearity in theory, but the inherent low frequency such as 1/f noise of the accelerometer decreases the signal-to-noise ratio greatly, and it is the main influencing factors to precision and linearity of accelerometer. In this paper a new method to eliminate noise of vacuum microelectronic high precision accelerometer was first bring forward by using modulation and demodulation and coherent detection technology. The system mainly includes AC signal generator, current obtain, phase shift, demodulator, differential amplification and feedback control. At last, the noise between 0 Hz and 200Hz contrast test experiment of the accelerometer was carried out by oscilloscope, the result shows the mean spectrum density of output signal is 29μV/√Hz between 0 Hz and 200Hz. Static gravitation field rolling experiment in ±1 g is also performed to measure the linearity of the accelerometer; the least-square linear fitting curve shows the maximum nonlinear is 0.41%. Through the results we can draw conclusion that the noise and linear performs have been greatly improved through eliminated noise.

Citation Download Citation

Hai-tao Liu, Zhi-yu Wen, Li Chen, Zhong-quan Wen, and Xue-feng He "A new method to eliminate the noise of vacuum microelectronic high precision accelerometer", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 81911X (8 September 2011); https://doi.org/10.1117/12.900912

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KEYWORDS

Interference (communication)

Microelectronics

Phase shifts

Signal to noise ratio

Linear filtering

Demodulation

Modulation

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