8 September 2011 Optical properties of square-aperture planar microlens array
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In this part, to improve fill factor of microlens array, we designed a new type of square-aperture planar microlens array which is used for collecting and transferring optical information efficiently. By lithographic ion-exchange and a special technology to remove the 1.0 micron layer of titanium on the glass substrate, square-aperture planar microlens array is buried in the substrate and the fill factor of microlens array are larger than 98%. Each microlens unit of the array is square and has an aperture size of 0.2mm with the excellent capabilities of external stress and temperature. At last, many optical feature parameters of square-aperture planar microlens array are tested and analyzed, and the experimental results show that good performance can be used farther in studies and tests later.
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Jie Chen, Fengjun Zhang, Xiaomei Chen, Zhifang Zhao, Sumei Zhou, Xiaoping Jiang, Desen Liu, "Optical properties of square-aperture planar microlens array", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 819123 (8 September 2011); doi: 10.1117/12.901030; https://doi.org/10.1117/12.901030

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