Polymeric nanostructures fabricated by dynamic nanoinscribing technique and its applications

Liangjin Ge; Xudi Wang; Qisheng Tang; Jian Jin; Li Xin; Shaojun Fu

doi:10.1117/12.902409

8 September 2011 Polymeric nanostructures fabricated by dynamic nanoinscribing technique and its applications

Liangjin Ge, Xudi Wang, Qisheng Tang, Jian Jin, Li Xin, Shaojun Fu

Proceedings Volume 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies; 81912D (2011) https://doi.org/10.1117/12.902409
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

Nanoscale grating structure can be utilized in many practical applications in optics, flat-panel displays, and biosensors. Dynamic nanoinscribing (DNI) technique was newly developed to create large-area and truly continuous nanograting patterns in a variety of metal or polymer materials with feature size down to sub-50 nm and at very high speed. In this paper we investigate the nanopatterning of PC and SU-8 by DNI process and then take advantage of its superior optical and thermal properties to explore its applications in nanooptics and nanofluidics. To carry out nanoinscribing, silicon grating templates with different periods were first fabricated. The inscribing property of PC and SU-8 under various pressures and temperatures was systematically studied, in which the experimental results were compared with the simulation results described by a modified equation of Squeezed flow. Inscribed polymeric gratings with period of 700nm were achieved and excellent uniformity can now be routinely replicated using this optimized process. Using this technique, free-standing subwavelenth gratings based on SU-8 are successfully fabricated and their performance are characterized. The inscribed polymeric gratings could also be sealed with another bare layer thermally to serve as enclosed channels after oxygen plasma treatment. The fabricated nanofluidic channels were characterized using spontaneous capillary filling with dyed water, demonstrating good quality of sealing.

Citation Download Citation

Liangjin Ge, Xudi Wang, Qisheng Tang, Jian Jin, Li Xin, and Shaojun Fu "Polymeric nanostructures fabricated by dynamic nanoinscribing technique and its applications", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 81912D (8 September 2011); https://doi.org/10.1117/12.902409

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KEYWORDS

Polymers

Brain-machine interfaces

Nanolithography

Fabrication

Silicon

Positron emission tomography

Nanostructures

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