19 August 2011 Research on automatic recognition technology for interference fringes in measurement of thin film thickness
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Abstract
Interference image processing is the key technology of optical interference measurement. Using high resolution image sample system to recognize the interference fringe, which substituted the traditional method measured by technological worker, is improving the measurement accuracy of thin film thickness. This paper introduced the problems on automatic interference fringe processing in absolutely measurement based on laser interference, digital image processing technology. The image acquisition of the SiO2 film and the pre-processing of interferogram was performed. Decimal part of the interference fringes is obtained.
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Hao-ran Li, Hao-ran Li, Jun-hong Su, Jun-hong Su, Ai-ming Ge, Ai-ming Ge, Li-hong Yang, Li-hong Yang, } "Research on automatic recognition technology for interference fringes in measurement of thin film thickness", Proc. SPIE 8192, International Symposium on Photoelectronic Detection and Imaging 2011: Laser Sensing and Imaging; and Biological and Medical Applications of Photonics Sensing and Imaging, 819224 (19 August 2011); doi: 10.1117/12.900510; https://doi.org/10.1117/12.900510
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