22 August 2011 An improved real-time method for removing the cyclic error of a homodyne interferometer
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Abstract
The nonlinear error of a homodyne interferometer is presented: the amplitudes, the phase and the offsets. An improved compensation method is introduced since the conventional Heydeman modal' calculation is very time-consuming. First, the "zero drift" problem is solved with the polarization phase-shifting technology; second, a fast algorithm based on the Heydeman method is introduced to calculate the errors; and third, electronic circuit is used to remove the nonlinear errors timely. The test result shows that the nonlinearity of the homodyne interferometer could be reduced to subnanometer over the measuring range of 20cm, and the accuracy can be improved more than tenfold by the dynamic compensation method.
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Suwen Zhao, Desheng Wen, Shaolan Zhu, Shitong Liang, "An improved real-time method for removing the cyclic error of a homodyne interferometer", Proc. SPIE 8192, International Symposium on Photoelectronic Detection and Imaging 2011: Laser Sensing and Imaging; and Biological and Medical Applications of Photonics Sensing and Imaging, 81924G (22 August 2011); doi: 10.1117/12.902439; https://doi.org/10.1117/12.902439
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