8 September 2011 Infrared camera based on optical-readout bi-material FPA
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With the trend of developments of infrared-focal plane array (FPA) which is particularly pronounced in many applications, in this paper, we demonstrated an uncooled infrared (8~14μm) camera based on the optically read-out Bi-material Infrared FPA. We reported on the fabrication and characterization of arrays of bimaterial microcantilevers. On the basis of opto-mechanical effect and micro electromechanical system (MEMS) technology, a substrate-free FPA with the thermal isolated structure SiNx and Au for uncooled infrared imaging is developed, with 49.5μm×49.5μm of the pixel and 240×240 array, moreover, the camera had an average noise equivalent temperature difference (NETD) and a response time of 100mK and 100ms at 7Pa atmospheric pressure, respectively.
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Yan-mei Kong, Yan-mei Kong, Rui-wen Liu, Rui-wen Liu, Bin-bin Jiao, Bin-bin Jiao, Da-peng Chen, Da-peng Chen, } "Infrared camera based on optical-readout bi-material FPA", Proc. SPIE 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications, 81930X (8 September 2011); doi: 10.1117/12.899491; https://doi.org/10.1117/12.899491


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