8 September 2011 Research on an AlSiNx bi-material thermal-mechanical uncooled infrared FPA pixel
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AlSiNx bi-material thermal strain structure is used in uncooled optic readout infrared focal plane array (UOR IR FPA) pixel based on Micro-Electro-Mechanical Systems (MEMS) technology. In this paper, the problems that the AlSiNxstructure prevents FPA pixel scaling down and fill factor improving, and the Au reflection layer of the pixel leads to larger readout light energy loss are analyzed. The feasibility of AlSiNx instead of AlSiNx in the UOR IR FPA fabrication is researched in detail. The theoretical analyzing and simulation results demonstrate that, with optimized thicknesses and their matching designing of SiNx and Al, the thermal-mechanical response of AlSiNx bi-material structure is improved to 1.8 times and the intensity of optic readout signal is improved to about 2 times compared with AuSiNAlSiNx one.
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Xia Zhang, Xia Zhang, Da-cheng Zhang, Da-cheng Zhang, } "Research on an AlSiNx bi-material thermal-mechanical uncooled infrared FPA pixel", Proc. SPIE 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications, 81932M (8 September 2011); doi: 10.1117/12.900491; https://doi.org/10.1117/12.900491

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