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8 September 2011 The research of piezoelectric actuator for cryogenic scanning application
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This paper discusses piezoelectric bimorph actuator has been developed for use at cryogenic temperature as low as 120K. A novel piezoelectric actuator has been designed and fabricated based on piezoelectric bimorph. On this basis, an optical scanner has been developed that can be use for cryogenic scanning and point positioning. Complete experimental platform and high resolution measuring system have been set up and the piezoelectric scanner has been tested in dynamic scanning and static point positioning modes at both room temperature and cryogenic temperatures. The characteristics of the piezoelectric scanner at cryogenic temperatures have been analyzed, which verify the feasibility of the use of piezoelectric actuator for cryogenic optics applications. By analyzing the hysteresis characteristics of piezoelectric ceramics and the mechanical structure of the entire scanner, we have corrected the non-linearity of the scanning system through compensating driving voltage, which achieves a high linearity and pointing accuracy. The research in this paper provides a new idea for the design of image plane scanning system in space infrared cryogenic optics. The cryogenic piezoelectric actuator features large stroke, high precision, high linearity, not any friction, and is free of magnetic field interference, which is very promising for space infrared cryogenic optical application.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xuan Zhang, Gao-fei Zhao, and Ming Pan "The research of piezoelectric actuator for cryogenic scanning application", Proc. SPIE 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications, 819332 (8 September 2011);

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