Risk analysis on fabrication process of IRFPA

Hong-hai Wang; Xian-sheng Qin

doi:10.1117/12.900707

8 September 2011 Risk analysis on fabrication process of IRFPA

Hong-hai Wang, Xian-sheng Qin

Proceedings Volume 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications; 819334 (2011) https://doi.org/10.1117/12.900707
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

Because of the complexity and long cycle time which the fabrication process of IRFPA chip is, it is impossible that getting a best value through a lot of experiences and tests. Monte Carlo simulation provides a way to analyze and get the probability distribution of the process goal based on limited experience data. So we can maximally avoid taking the poorer parameter and effectively shorten the developing term for IRFPA chip. In this paper, a general fabrication process of IRFPA chip is analyzed by Monte Carlo simulation. According to the function relations between the principal technical indexes and the main parameters of the process, the mathematics model is established. Applying computer software, the process model will be operated based on any random parameter sequence from a random data producer, and then the risk analysis result for the fabrication process of IRFPA chip is obtained. The result not only describes the process goal probability distribution but also provides the optional parameter sequence of given process goal. So that engineer can balance the control points of fabrication process to take suitable technical decision.

Citation Download Citation

Hong-hai Wang and Xian-sheng Qin "Risk analysis on fabrication process of IRFPA", Proc. SPIE 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications, 819334 (8 September 2011); https://doi.org/10.1117/12.900707

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KEYWORDS

Monte Carlo methods

Statistical analysis

Process modeling

Mathematical modeling

Sensors

Interference (communication)

Data modeling

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