18 August 2011 Rapid fabrication of lightweight SiC mirror using CCOS
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Abstract
A 500mm class SiC flat mirror was polished up to 21nm (RMS value) with CCOS in a very short period. The lightweight mirror structure, the mount method, the choose of the diamond powder, the CCOS procedure is presented in the paper. In addition, the efficiency of the procession is further be analyzed to make the batch production of this kind of hard material mirror be possible.
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Heng Zhu, Xia-lai Liu, Ding-yao Yan, Ping Ma, "Rapid fabrication of lightweight SiC mirror using CCOS", Proc. SPIE 8194, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Imaging Detectors and Applications, 81942A (18 August 2011); doi: 10.1117/12.900575; https://doi.org/10.1117/12.900575
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