5 December 2011 The instrument of high-precision photoelectric autocollimator based on PSD
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Proceedings Volume 8197, 2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 819709 (2011) https://doi.org/10.1117/12.904631
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China
Abstract
In response to the accuracy of most autocollimator measurement is not high, and limited to one-dimensional static measurement., we designed a kind of high-precision photoelectric self-collimation measurement system which based on position sensitive detector(PSD). The system uses a return-type optical path to reduce equipment size, and the use of neural network based on the PSD for the non-linear correction. When the distance is 10m, it can achieve the measurement range ± 4', full-range measurement error of less than 0.1", measurement resolution of less than 0.01" and other technical indicators.
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Xinting Zhang, Xinting Zhang, Zhiyong An, Zhiyong An, } "The instrument of high-precision photoelectric autocollimator based on PSD", Proc. SPIE 8197, 2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 819709 (5 December 2011); doi: 10.1117/12.904631; https://doi.org/10.1117/12.904631
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