Design of photoelectric autocollimator for NC rotary table position detection

Mingjun Hu; Bixi Yan; Lianqing Zhu

doi:10.1117/12.905924

5 December 2011 Design of photoelectric autocollimator for NC rotary table position detection

Mingjun Hu, Bixi Yan, Lianqing Zhu

Proceedings Volume 8197, 2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 819717 (2011) https://doi.org/10.1117/12.905924
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China

Abstract

A photoelectric autocollimator of large measuring range for detecting position accuracy of NC rotary table is designed. The autocollimator has a measurement range of ±30'. The measurement accuracy and the resolution of the autocollimator are 2" and 0.32" respectively. The autocollimator applies an area CCD camera as its detector, which can realize two-axis measuring at the same time and automatically detect the position of the rotary table. The important components of the autocollimator are designed such as objective lens, ocular lens, cross reticule, beam splitter prism. A LED light is used in the autocollimator for its high brightness. Using the ZEMAX optical design program, the light path of the system is analyzed and optimized to ensure the spherical aberration within -0.05mm~+0.05mm and the sine aberration of 0.0003mm. The MTF value of field of view is more than 0.5 at the half Nyquist frequency. The MTF is higher than 0.3 within 0.7 FOV at the Nyquist frequency. RMS radiuses are less than Airy disk. The mechanical structure of the autocollimator is designed. And two adjusting devices to regulate the position of the reticule and the objective lens are designed to ensure the reticule at the right position and to get an excellent imaging performance in CCD. The performance of the debugging sample machine has been tested, The error of indication of the autocollimator is contrasted and the result is consistent with the specification above.

Citation Download Citation

Mingjun Hu, Bixi Yan, and Lianqing Zhu "Design of photoelectric autocollimator for NC rotary table position detection", Proc. SPIE 8197, 2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 819717 (5 December 2011); https://doi.org/10.1117/12.905924

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