5 December 2011 Novel MOEMS-based beam steering method
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Proceedings Volume 8197, 2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 81971D (2011) https://doi.org/10.1117/12.907024
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China
Abstract
This paper proposes a novel Micro-Opto-Electro-Mechanical-System (MOEMS) based beam steering method mainly designed for far operating distance applications. The proposed system incorporates a MOEMS analog mirror developed by Texas Instruments Inc. as core component and a beam expanding telescope. The analog mirror can change angle within a ±5° range of mechanical rotation in two axes. The expanding telescope could reduce beam dispersion caused by diffraction of the mirror's boundary. Expressions of steering equation, steering range and angular resolution are deduced. Steering trace and far field steering beam patterns are simulated. Analyses on main performance of the system are proposed.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jingye Wang, Qun Hao, Yong Song, and Yao Hu "Novel MOEMS-based beam steering method", Proc. SPIE 8197, 2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 81971D (5 December 2011); doi: 10.1117/12.907024; https://doi.org/10.1117/12.907024
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