22 November 2011 A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching
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Proceedings Volume 8199, 2011 International Conference on Optical Instruments and Technology: Optical Sensors and Applications; 81991L (2011) https://doi.org/10.1117/12.910383
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China
Abstract
A miniature fiber optic pressure sensor based on Fabry-Perot interference fabricated on the tip of a single mode (SM) fiber is presented. The sensor measures only 125μm in diameter. A Fabry-Perot cavity and a thin silica diaphragm are fabricated by simple techniques involving only cleaving, wet chemical etching and fusion splicing. Interference pattern of the sensor is analyzed and issues in sensor design are discussed. The overall chemical reaction of the fiber wet etching is specifically represented. Pressure testing system is carried out. By tracing a peak point in the interference spectrum, the gap length of the sensor can be demodulated. Experimental results show the sensor has a good linearity. The sensor is made entirely of fused silica, whose structure has good stability, cabinet, simple for fabrication and low cost.
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Yixian Ge, Junping Zhou, Tingting Wang, "A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching", Proc. SPIE 8199, 2011 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 81991L (22 November 2011); doi: 10.1117/12.910383; https://doi.org/10.1117/12.910383
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