30 November 2011 Collimation testing of the wavefront of interferometer by scanning cube corner retro-reflector method
Author Affiliations +
Proceedings Volume 8201, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 82010K (2011) https://doi.org/10.1117/12.903713
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China
Abstract
The wavefront collimation of the optical interferometric systems must be controlled strictly. A scanning cube corner retro-reflector is introduced to divide the wavefront of the interferometer into a series of sub-wavefronts. The tilt angles of all the sub-wavefronts are obtained to reconstruct the tested wavefront thus the collimation test of the wavefront can be realized. The wavefront in the horizontal direction of a 100mm aperture interferometer is tested and reconstructed. The PV and RMS value of the collimated wavefront are 0.629λ and 0.130λ. The effect of system error on the experimental results is analyzed. The experimental results show that this method is of low cost and high accuracy, and is particularly applicable to the collimation test of a large aperture wavefront.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhaodong Liu, Zhaodong Liu, Lei Chen, Lei Chen, Zhigang Han, Zhigang Han, Wulan Tuya, Wulan Tuya, } "Collimation testing of the wavefront of interferometer by scanning cube corner retro-reflector method", Proc. SPIE 8201, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 82010K (30 November 2011); doi: 10.1117/12.903713; https://doi.org/10.1117/12.903713
PROCEEDINGS
7 PAGES


SHARE
Back to Top