30 November 2011 Experimentation and analysis of soft x-ray grazing incidence optical scattering phenomena
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Proceedings Volume 8201, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 820118 (2011) https://doi.org/10.1117/12.904732
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China
Abstract
The optical performance is severely degraded by surface scattering effects, especially for short wavelength imaging systems. Surface scattering effects is one of important factors degrading imaging performance. Study of non-intuitive surface scatter effects resulting from practical optical fabrication tolerances is a necessary work for optical performance evaluation of high resolution imaging systems. In this paper, surface scattering numerical model of grazing incidence imaging systems is discussed at first. Then Soft X-ray optical scattering distribution is measured by a soft X-ray reflectometer, for different sample mirrors, wavelength and grazing angle. By dealing with experimental data, different factors effects on surface scattering, such as glancing angle, wavelength and roughness is computed and analysised. It is indicated that the scattering increases as the grazing angle increases, surface roughness increases and the wavelength decreases, and optical system performance decreases.
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Shu-yan Chen, Shu-yan Chen, Li Cheng, Li Cheng, Xin-jun Xu, Xin-jun Xu, "Experimentation and analysis of soft x-ray grazing incidence optical scattering phenomena", Proc. SPIE 8201, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 820118 (30 November 2011); doi: 10.1117/12.904732; https://doi.org/10.1117/12.904732
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