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30 November 2011 Simultaneous phase-shifting Fizeau interferometer based on birefringent thin film and Dammann grating
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Proceedings Volume 8201, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 82011X (2011) https://doi.org/10.1117/12.906413
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China
Abstract
A simultaneous phase-shifting Fizeau interferometer based on birefringent thin film and Dammann grating is presented. The circularly polarized laser is reflected by the reference plate to form the reference beam and transmitted from the reference plate with the birefringent thin film to form the test beam. The test beam is reflected by the test surface and transmitted from the reference plate again. Its rotation direction is reversed. The orthogonally circularly polarized reference and test beams are obtained. A Dammann grating and an analyzer array are used to achieve simultaneous phase shift. This interferometer can reduce the effect of residual birefringence to increases the measurement accuracy. It is strictly common-path simultaneous phase-shifting Fizeau interferometer with simple structure and easy operation. In experiments, a wedge plate was measured and its simultaneous phase-shifting interferograms were obtained. With these results, the feasibility of the interferometer is verified.
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Linglin Zhu, Aijun Zeng, and Huijie Huang "Simultaneous phase-shifting Fizeau interferometer based on birefringent thin film and Dammann grating", Proc. SPIE 8201, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 82011X (30 November 2011); https://doi.org/10.1117/12.906413
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