28 November 2011 Subwavelength binary blazed grating optical switch based on TiO2-on-SiO2
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Abstract
A high-perform and compact subwavelength binary blazed grating optical switch was designed based on TiO2-on-SiO2. By appropriate choice of grating parameters including thicknesses, periods, height, and fill factor, to optimize the diffraction properties, a relative high diffraction efficiency and large diffraction angle was obtained simultaneously. The diffraction efficiency of the first switching channel is about 80% with a 45° diffraction angle, and the diffraction efficiency of the second channel is around 90% with a 30° diffraction angle. The device layout is simple, feasible, one-step etch, and compatible with standard CMOS technology processing.
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Junbo Yang, Junbo Yang, Zhou Wei, Zhou Wei, Hualiang Zhang, Hualiang Zhang, Xueao Zhang, Xueao Zhang, Honghui Jia, Honghui Jia, Shiqiao Qin, Shiqiao Qin, "Subwavelength binary blazed grating optical switch based on TiO2-on-SiO2", Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 82020X (28 November 2011); doi: 10.1117/12.905171; https://doi.org/10.1117/12.905171
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