Subwavelength binary blazed grating optical switch based on TiO2-on-SiO2

Junbo Yang; Zhou Wei; Hualiang Zhang; Xueao Zhang; Honghui Jia; Shiqiao Qin

doi:10.1117/12.905171

28 November 2011 Subwavelength binary blazed grating optical switch based on TiO₂-on-SiO₂

Junbo Yang, Zhou Wei, Hualiang Zhang, Xueao Zhang, Honghui Jia, Shiqiao Qin

Proceedings Volume 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology; 82020X (2011) https://doi.org/10.1117/12.905171
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China

Abstract

A high-perform and compact subwavelength binary blazed grating optical switch was designed based on TiO₂-on-SiO₂. By appropriate choice of grating parameters including thicknesses, periods, height, and fill factor, to optimize the diffraction properties, a relative high diffraction efficiency and large diffraction angle was obtained simultaneously. The diffraction efficiency of the first switching channel is about 80% with a 45° diffraction angle, and the diffraction efficiency of the second channel is around 90% with a 30° diffraction angle. The device layout is simple, feasible, one-step etch, and compatible with standard CMOS technology processing.

Citation Download Citation

Junbo Yang, Zhou Wei, Hualiang Zhang, Xueao Zhang, Honghui Jia, and Shiqiao Qin "Subwavelength binary blazed grating optical switch based on TiO₂-on-SiO₂", Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 82020X (28 November 2011); https://doi.org/10.1117/12.905171

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