28 October 2011 Design and modeling of XYθ H type stage using 1 rotational DOF flexure joint
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Proceedings Volume 8205, 2011 International Conference on Photonics, 3D-Imaging, and Visualization; 820518 (2011) https://doi.org/10.1117/12.906153
Event: 2011 International Conference on Photonics, 3D-imaging, and Visualization, 2011, Guangzhou, China
Abstract
It is important that high precision positioning system to cope with development of semiconductor and FPD manufacturing/inspection procedure. In this paper, the H type stage with flexure joint was proposed to compensate the yaw error in H type stage caused by manufacturing error, assembly error, and synchronous error. To implement the yaw motion in H type stage, 1 rotational DOF flexure joint which has high stiffness and endurance was proposed. Conceptual design of H type stage was performed to follow the criteria for precision machine design. The performance of H type stage was verified by real time experiment.
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Kyoungchon Kim, Daegab Gweon, Namryoung Choi, Dongpyo Hong, "Design and modeling of XYθ H type stage using 1 rotational DOF flexure joint", Proc. SPIE 8205, 2011 International Conference on Photonics, 3D-Imaging, and Visualization, 820518 (28 October 2011); doi: 10.1117/12.906153; https://doi.org/10.1117/12.906153
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