Surface and interface study of SiO2-x coated InP/InGaAs/InGaAsP semiconductor laser microstructures processed in the soft KrF laser irradiation regime

Neng Liu; Sonia Blais; Jan J. Dubowski

doi:10.1117/12.910701

20 January 2012 Surface and interface study of SiO_2-x coated InP/InGaAs/InGaAsP semiconductor laser microstructures processed in the soft KrF laser irradiation regime

Neng Liu, Sonia Blais, Jan J. Dubowski

Author Affiliations +

Proceedings Volume 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers; 820609 (2012) https://doi.org/10.1117/12.910701
Event: Pacific Rim Laser Damage Symposium: Optical Materials for High Power Lasers, 2011, Shanghai, China

Abstract

The ability of a UV laser to modify surface properties of quantum well (QW) microstructures that would lead to formation of a "defective layer" is of particular interest to the process of QW intermixing (QWI). We discuss the results of surface and interface study of InGaAs/InGaAsP QW microstructures capped with InP and a 243-nm thick layer of SiO_2-x that were irradiated with a KrF excimer laser delivering up to 25 pulses at 124 mJ/cm². The optical quality of SiO₂ films remains relatively unaffected by the irradiation with the KrF laser operating in the investigated window of parameters. The x-ray photoelectron spectroscopy experiments point out the negligible role of SiO_2-x in out-diffusion of matrix atoms that would enhance the QWI process. However, the KrF laser was found to significantly modify the interface between UV transparent SiO_2-x and the InP layer. Our results suggest that the resulting layer of the altered material promotes out-diffusion of atoms and intermixing in the QW region.

Citation Download Citation

Neng Liu, Sonia Blais, and Jan J. Dubowski "Surface and interface study of SiO_2-x coated InP/InGaAs/InGaAsP semiconductor laser microstructures processed in the soft KrF laser irradiation regime", Proc. SPIE 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, 820609 (20 January 2012); https://doi.org/10.1117/12.910701

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