12 January 2012 Effect of the deposition processes on the micro-defects and laser-induced damage threshold of thin films
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Proceedings Volume 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers; 82060O (2012) https://doi.org/10.1117/12.909849
Event: Pacific Rim Laser Damage Symposium: Optical Materials for High Power Lasers, 2011, Shanghai, China
Abstract
Micro-defect is one of key limiting factors in the improvement of the laser-induced damage threshold (LIDT) of thin films. In the present paper, thin films were prepared using the electron-beam evaporation technique with different coating materials and pre-melting processes. The relationships of thin film LIDT with impurity element content and with pre-melting processes were investigated. The experiment results indicate that a number of impurity elements play an important role in the LIDT of the samples. An efficient pre-melting process is necessary to maintain deposition stability, which could also reduce micro-defect density in thin films.
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Dongping Zhang, Dongping Zhang, Ping Fan, Ping Fan, Guangxing Liang, Guangxing Liang, Ting Zhang, Ting Zhang, Xingmin Cai, Xingmin Cai, Rengui Huang, Rengui Huang, } "Effect of the deposition processes on the micro-defects and laser-induced damage threshold of thin films", Proc. SPIE 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, 82060O (12 January 2012); doi: 10.1117/12.909849; https://doi.org/10.1117/12.909849
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