Ellipsometric Study Of ZnO/Ag/ZnO Optical Coatings: Determination Of Layer Thicknesses And Optical Constants

K. Memarzadeh; J. A. Woollam; A. Belkind

doi:10.1117/12.941868

12 November 1987 Ellipsometric Study Of ZnO/Ag/ZnO Optical Coatings: Determination Of Layer Thicknesses And Optical Constants

K. Memarzadeh, J. A. Woollam, A. Belkind

Author Affiliations +

Proceedings Volume 0823, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VI; (1987) https://doi.org/10.1117/12.941868
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Variable angle of incidence spectroscopic ellipsometry was used to study the ZnO/Ag/ZnO (dielectric-metal-dielectric) optical coatings. As a result, the three layer thicknesses, the optical constants of the ZnO layers (3000-8000 W), and the optical constants of the Ag layers (3500-8000 Å) measured on three coated glass samples are reported here. The thickness measurements obtained by ellipsometry agreed with those determined from cross sectional TEM photos well within the error margins of the two techniques. In addition, the spectral dependence of the index of refraction of the silver layers were characterized by oscillations absent in the bulk silver optical data, and likely due to the generation of surface and bulk plasmons.

Citation Download Citation

K. Memarzadeh, J. A. Woollam, and A. Belkind "Ellipsometric Study Of ZnO/Ag/ZnO Optical Coatings: Determination Of Layer Thicknesses And Optical Constants", Proc. SPIE 0823, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VI, (12 November 1987); https://doi.org/10.1117/12.941868

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