Recently there have been tremendous interests about the fabrication of the solid state nanopore due to the capability of
the solid state nanopore as a single molecule sensor. The SiN nanopore and the SiO2 nanopore have been fabricated with
high energy electron beam exposure such as transmission electron microscopy, field emission electron microscopy, and
focused ion beam sculpting. However, the plasmonic Au nano-pore can be utilized as a nanobio optical sensor due to the
106 fold increase of the Raman signal intensity. Hence, in this report, the fabrication of the plasmonic nanopore with less
than ~ 10 nm on the apex of the micronsize pyramidal structure using various high energy electron beam exposure.
Under the electron beam exposure of FESEM followed by EPMA, the widening and the shrinking of the Au nanopore
were observed depending upon the EPMA probe current. The diameters of the Au nanopore was also reduced
successively from ~ 5 nm down to zero using 200 keV TEM. From these experimental results, the dynamics of the
nanopore formation are found to depend on the viscosity of the membrane, radiation damage, and evaporation of the
materials under high vacuum condition. This fabricated plasmonic nano-pore device can be utilized as geneome
sequencing device or a single-molecule sensor.