Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement

B. Jaeggi; B. Neuenschwander; U. Hunziker; J. Zuercher; T. Meier; M. Zimmermann; K. H. Selbmann; G. Hennig

doi:10.1117/12.909844

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15 February 2012 Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement

B. Jaeggi, B. Neuenschwander, U. Hunziker, J. Zuercher, T. Meier, M. Zimmermann, K. H. Selbmann, G. Hennig

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Proceedings Volume 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII; 82430K (2012) https://doi.org/10.1117/12.909844
Event: SPIE LASE, 2012, San Francisco, California, United States

Abstract

For surface and 3D structuring the ultra short pulsed laser systems are mostly used in combination with galvo scanners. This work reports on the synchronization of the scanner mirror motion with the clock of the laser pulses, which is usually in the range of 100 kHz and higher, by a modification of the electronic scanner control. This synchronization facilitates the placement of the small ablation craters from single pulses with the precision of about 1 μm relative to each other. The precise control of the crater positions offers the possibility to test and optimize new structuring strategies. Results of this optimization process with respect to minimum surface roughness, steepness of wall, accuracy to shape and efficiency will be presented.

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B. Jaeggi, B. Neuenschwander, U. Hunziker, J. Zuercher, T. Meier, M. Zimmermann, K. H. Selbmann, and G. Hennig "Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement", Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430K (15 February 2012); https://doi.org/10.1117/12.909844

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