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30 January 2012 Rapid prototyping of biocompatible sensor chips by picoseconds laser structuring of a platinum/ tantalum pentoxide thin film layer system
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Abstract
Sensor chips to measure electrical signals of living cells are patterned with lasers from thin films of platinum as the conductive layer and tantalum pentoxide as the isolating layer. The selective ablations of the transparent tantalum pentoxide alone as well as the complete removal of both layers were investigated using picosecond laser pulses at different fluences. Ablation threshold values were measured for the irradiation either from the layer (front) side or from the glass (back) side. We observed complete and selective laser ablation of the films at low laser fluences.
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Gerhard Heise, Daniel Trappendreher, Florian Ilchmann, Robin S. Weiss, Bernhard Wolf, and Heinz P. Huber "Rapid prototyping of biocompatible sensor chips by picoseconds laser structuring of a platinum/ tantalum pentoxide thin film layer system", Proc. SPIE 8247, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XII, 82470X (30 January 2012); https://doi.org/10.1117/12.908495
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