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Optically transparent, flexible pressure sensor array micromachined utilizing plasma assisted bonding
Fabrication of microstructures with continuous surface profiles and very large sag heights by laser lithography
Design of experiment for the optimisation of deep reactive ion etching of silicon inserts for microfabrication
Fabrication qualities of micro-gratings encoding dependence on laser parameters by two-beam femtosecond lasers interference
Numerical simulation of hot imprint process of periodical lamellar microstructure into polycarbonate